High speed 3d shape measurement with temporal fourier. The proven multisensor technology of frt enables the combination of different technologies and measuring ranges in one optical. But the process of phase unwrapping may affect the quality of absolute phase. After contrast is corrected, the 3d profile of the object will be completed by phase shift profilometry. The standard for profilometry x y scan area height range desktop dimensions scan speed 200 x 150mm motorized 2. Phase measurement profilometry pmp has been widely used in automatic processing cadcam, computer vision, and reverse engineering 109 because of its. Conference proceedings papers presentations journals. Optical sensors fast, flexible, accurate and contact free. In phasemeasuring profilometry, a sequence of phaseshifted sinewave patterns is projected onto a. In the case of phase measuring profilometry pmp, the projected patterns are composed of a rolling sinusoidal wave, but as a. A calibration gauge containing four virtual calibration planes is. Phase measuring sensors are often used for singe point or whole field profilometry, for example profiling of threedimensional objects. The application of the calibration gauge avoids the translation of the standard plane during the calibration process. A new method for both the phase height mapping and the 3d coordinate calibration in phase measuring profilometry pmp is presented.
Fourier transform profilometry ftp 4,5,6,7,8 and phase measurement profilometry pmp 9,10,11,12 are the prominent representative methods among them. Introduction with the rapid development of industrialization, the high measurement accuracy of phasemeasuring profilometry pmp makes it useful for various applications. These surface roughness testers profilometer are distinguished by a high level of accuracy, multiple parameters and simplicity of operation. Optical, noncontact, automated experimental techniqes for.
Overview of phase measuring profilometry structured light illumination by lgh 1172014 updated 11102014. Abnormal phase removing method in phase measuring profilometry. New phase measuring deflectometry device for midtohigh. A direct mapping algorithm for phasemeasuring profilometry. Phasemeasuring profilometry is the most promising of the three techniques for mapping rock fracture surfaces. Critical dimensions as step, curvature, flatness are computed from the surface topography. A profilometer is a measuring instrument used to measure a surfaces profile, in order to quantify its roughness. An overview covalent metrologys mission is to help customers solve measurement, materials and process problems quickly and efficiently. In the case of phase measuring profilometry pmp, the projected patterns are composed of a rolling sinusoidal wave, but as a set of.
In this paper, two cameras are equipped in our system to obtain fast and static measurement compared to the conventional measuring system with single camera which needs rotated measurement. Structured light illumination is an active 3d scanning technique based on projectingcapturing a set of striped patterns and measuring the warping of the patterns as they reflect off a target objects. Phase measuring profilometry pmp is an important technique used in 3d data acquisition. Shape measurement by phasestepping method using multiline leds. Profilometry for surface characterization and dimensioning is a key area of expertise for covalent. When a sinusoidal grating is projected on either a reference plane or a diffuse object to be measured, every point along a line normal to the grating lines, on the reference plane as well as the object, can be. The key component to this technique is directing the light in a way that it can detect the surface in 3d. Assuming an accurate calibration has been performed, the difference in phase between the two signals known as phase shift is a result of the. Dynamic 3d shape measurement based on the phaseshifting. As the number of codewords adopted in phasecoding fringes increases, the solution of fringe orders leads to many mistakes.
There exist a host of interferometric based techniques for single point and whole field profilometry, from synthetic aperture radar sar 3 to fringe projection 4. In this paper, two algorithms developed for phase acquisition of such images are presented and compared. Phasemeasuring profilometry using sinusoidal grating springerlink. Structured light phase measuring profilometry pattern design for binary spatial light modulators. Phasemeasuring profilometry using sinusoidal grating. This paper proposes a highspeed fpga architecture for the phase measuring profilometry pmp algorithm. Deflectometry is able to satisfy this demand because it can. Saturation model and phase recovering for phase measuring. This paper presents a dynamic phase measurement profilometry pmp method based on the simulated annealing algorithm. When a sinusoidal amplitude grating is projected on an object, the surfaceheight distribution of the object is translated to a phase distribution of the deformed. A calibration gauge containing four virtual calibration planes.
The technique is based on the principle of phase measurement of a projected grating image on the object surface which conforms to the shape of the object. The hold process tracks the phase map with a one shot of light stripe pattern. In view of the limitation of wangs method,we proposed a dynamic threedimensional3d measurement based on the phase. The response signal can be either reflected or transmitted. Improving the accuracy performance of phase shifting profilometry for the measurement of objects in motion abstract this letter presents a new approach to reducing the errors associated with the shape measurement of a rigid object in motion by means of phase shifting profilometry.
Absolute depth measurement using multiphase normalized cross. While the historical notion of a profilometer was a device similar to a phonograph that measures a surface as the surface is moved relative. Stair phase coding fringe plus phase shifting used in 3d measuring profilometry zhuohuan zeng, biao li, yanjun fu and minggang chai abstract as the number of codewords adopted in phase coding fringes increases, the solution of fringe orders leads to many mistakes. The theory of using an intensitycorrecting algorithm to.
Pdf phaseheight mapping and coordinate calibration. A new method for both the phaseheight mapping and the 3d coordinate calibration in phasemeasuring profilometry pmp is presented. Phasemeasuring profilometry is the most promising of the three techniques for mapping rock fracture surfaces automatically, accurately, quickly, and with high. Among all sli methods, the phase measuring profilometry pmp is recognized as one of the most robust and precise strategy 5. A new fast 3d profilometry is presented in this paper.
Us7304745b2 phase measuring method and apparatus for multi. Digital fringe projection dfp based 3d optical shape measurement. A direct phasetoheight mapping algorithm for phasemeasuring profilometry is presented and verified by experiments. The direct mapping formula can be generated by measuring the phases of several different parallel planes rather than geometric parameters of the optical system. Compared to other optical methods for 3d shape measurement, this technique is not only faster but also more accurate. The whole pmp algorithm is designed and implemented based on the principle of full. A calibration gauge containing four virtual calibration planes is designed. Advanced photonics journal of applied remote sensing. Rgb tricolor based fast phase measuring profilometry. The whole pmp algorithm is designed and implemented based on the principle of fullpipeline and parallelism. In this method we analyze each pixel of the captured pattern sequence as a temporal signal. Pdf structured light phase measuring profilometry pattern. The main objective was to test the limitations of three experimental. Calibration of a fringe projection 3d measurement system.
Pdf automated phasemeasuring profilometry of 3d diffuse. Highspeed fpgabased phase measuring profilometry architecture. Shape measurement by phasestepping method using multiline leds yoshiharu morimoto 1, akihiro masaya 1, motoharu fujigaki 2 and daisuke asai 3 1moire institute inc. Fpgabased phase measuring profilometry system request pdf. Osa dynamic phase measuring profilometry for rigid.
The direct mapping formula can be generated by measuring the phases of. Many techniques can extract the phase distribution of distorted fringes. Optical threedimensional sensing by phase measuring profilometry. The experimental setups used to assess these different techniques are similar, and they require essentially the same equipment. The phaseacquisition algorithms are sufficiently simple that highresolution phase maps. Pdf a novel encodedphase technique for phase measuring. Optical profilometry uses light instead of a physical probe. The results show that the accuracy of the fpga system is comparable with those of current topperforming software implementations. A direct phase toheight mapping algorithm for phase measuring profilometry is presented and verified by experiments. In the case of phase measuring profilometry pmp, the projected patterns are composed of a rolling sinusoidal wave, but as a set of timemultiplexed patterns, pmp requires the target surface to. Absolute phase retrieval methods for digital fringe projection profilometry. Shape measurement by phasestepping method using multi. Absolute phase retrieval methods for digital fringe projection.
Dynamic 3d shape measurement based on the phaseshifting moire algorithm. Yongchang wang, kai liu, qi hao, daniel lau, and laurence g. Multicamera phase measuring profilometry for accurate. Osa automated phasemeasuring profilometry of 3d diffuse. Stair phasecoding fringe plus phaseshifting used in 3d. These surface roughness testers profilometer are distinguished by a high. Psp is widely used in industrial applications and many other fields because of its accuracy and efficiency. A random phase shift atgorithm based on the principle of phase measuring profilometry with a projected sinusoidal grating to 360 measurement of the surface topography of 3d diffuse objects is. Automated phasemeasuring profilometry of 3d diffuse objects. Gamma model and its analysis for phase measuring profilometry article pdf available in journal of the optical society of america a 273. The probability distribution functions pdf of the wrapped phase will become abnormal when there are nonlinear effects in a phase measuring profilometry.
The profilometry of three dimensional objectives based on phase approaching of projected grating is widely used in various fields of application engineering. The phase acquisition algorithms are sufficiently simple that highresolution phase maps using a highresolution area detector array can be generated in a short time. Multicamera phase measuring profilometry for accurate depth measurement. The main objective was to test the limitations of three experimental techniques. Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image. Canlin zhou 1,shuchunsi1,xiaoleili3, zhenkun lei2, yanjie li3, chaorui. Structured light illumination is an active 3d scanning technique based on projectingcapturing a set of striped patterns and measuring the warping of the patterns as they reflect off a target objects surface. Online phase measuring profilometry based on phase. In this paper, a modified stair phase coding fringe is designed, and a new phase unwrapping algorithm based on shifting fringe order is. Investigation of phase pattern modulation for digital. A new fast profilometer for fullfield 3d shape measurement is implemented.
Highspeed 3d shape measurement using fourier transform. Phase measuring profilometry is the most promising of the three techniques for mapping rock fracture surfaces automatically, accurately, quickly, and with high resolution. Deformed grating images are detected by an array camera and processed by a microcomputer. Twocamera phase measuring profilometry system scientific. Online phase measuring profilometry based on phase matching is proposed. Three optical, noncontact, automated experimental techniques for determining the topography of object surfaces were assessed. While the work previously reported is only valid for. Robust measurement of the diffuse surface by phase shift. Thus, increasing the codeword approach in a phase coding fringe remains a challenge. Optical, noncontact, automated experimental techniques for. Structured light phase measuring profilometry pattern. Universal phase unwrapping for phase measuring profilometry.
This versatility allows many of our clients to use the system for a variety of related inspection tasks. Profilometry tools and test plates can be used, but they only provide line scans or qualitative information, so a quantitative full surface measurement can be time consuming depending on the desired spatial resolution. For the phasetoheight conversion, an equiphase coordinate. Phase measuring profilometry is a method of structured light illumination whose threedimensional reconstructions are susceptible to error from nonunitary gamma in. However, pixel matching by the global traversing algorithm takes up most of the time in the whole reconstruction process. Optical, noncontact, automated experimental techniqes for threedimensional reconstruction of object surfaces using projection moire, stereo imaging, and phasemeasuring profilometry. Stepped frequency radar target recognition using locality preserving projections p. Osa dynamic phase measuring profilometry for rigid objects. After contrast is corrected, the 3d profile of the object will be completed by phaseshift profilometry. We introduce you to a structured light illumination sli method known as phase measuring profilometry pmp. By adding an additional special phaseshifting sinusoidal grating to. Structured light phase measuring profilometry pattern design for.
The latest in stateoftheart surface roughness testers profilometer, the srg4000 is designed with the shop environment in mind. Improving the accuracy performance of phase shifting profilometry for the measurement of objects in motion lei lu,1 jiangtao xi,1, yanguang yu,1 and qinghua guo1 1school of electrical computer and. Introduction threedimensional shape measurement is used in various fields such as robotics and inspection of industry production. Online phase measuring profilometry based on phase matching. Saturation model and phase recovering for phase measuring profilometry p. A flexible phase error compensation method based on. Shape measurement by phase stepping method using multiline leds yoshiharu morimoto 1, akihiro masaya 1, motoharu fujigaki 2 and daisuke asai 3 1moire institute inc. Improving the accuracy performance of phaseshifting. While just one fixed sinusoidal fringe is projected on a measured object moving with the pipeline, deformed patterns modulated by the object moving at the same distance moment are captured synchronously by the ccd camera. As the number of codewords adopted in phase coding fringes increases, the solution of fringe orders leads to many mistakes. Although the phase measuring method can reach more high precision, its real measurement speed is very low and cant be applied on. Pdf gamma model and its analysis for phase measuring.
Extremely sensitive and highly accurate readings from this phase ii. Pdf multicamera phase measuring profilometry for accurate. In view of the limitation of wangs method,we proposed a dynamic threedimensional3d measurement based on the phaseshifting moire algorithm. Optical threedimensional sensing by phase measuring. A novel phase measurement profilometry based on linear ccd.
With the known iterative phase compensation algorithm, the most appropriate coefficients will be obtained by smoothing the pdf. Singleshot absolute 3d shape measurement with fourier. Besides absolute phase retrieval is timecosting especially for highspeed 3d shape measurement. Unfortunately, only an ambiguous estimation instead of an accurate measurement could be achieved. Multiple phase shift patterns are projected onto the 3d target and. A shearing polarization interferometer is used for projection. Hassebrook multicamera phase measuring profilometry for accurate depth measurement, proc. The lock process establishes the mapping between the phase map computed by phase shift profilometry and the phase map computed by the light stripe method. Measuring the 3d shape of high temperature objects using.
Optimized twofrequency phasemeasuring profilometry light. Highresolution 3d profilometry with binary phaseshifting. Phase measurements compare the phase of the signal going into a device the incident signal to the phase of the devices response signal. In dynamic pmp for rigid objects, pixel matching is an effective method to make onetoone pixel correspondence in each captured pattern. Spie 6555, sensors and systems for space applications. Osa highspeed fpgabased phase measuring profilometry. Calibration is to transform the 2d phase information to the world coordinates in a fringe projection 3d measurement system. The high resolution surface profile of a 3d diffuse object is obtained by measurement of the phase distribution across the image of a projected sinusoidal grating deformed by the surface. The fringe projection profilometry with sinusoidal patterns based on phaseshifting algorithms is commonly distorted by the nonlinear intensity response of commercial projector. While just one fixed sinusoidal fringe is projected on a measured object moving with the pipeline, deformed. Stair phasecoding fringe plus phaseshifting used in 3d measuring profilometry zhuohuan zeng, biao li, yanjun fu and minggang chai abstract as the number of codewords adopted in phasecoding fringes. Automated phase measuring profilometry of 3d diffuse objects. Introduction with the rapid development of industrialization, the high measurement. This paper proposes a fast measurement method based on fourier transform profilometry and stereo vision.
326 781 352 1165 500 3 402 113 758 1246 160 1232 1251 1008 463 223 1073 1076 407 371 1418 762 1363 26 997 667 1540 664 640 891 296 1233 958 605 757 230 1265 833